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Characteristics of CVD Grown Diamond Films on Langasite Substrates Authors
ISSN: 1929 - 5634
Publisher: author
Characteristics of CVD Grown Diamond Films on Langasite Substrates Authors
Indexed in
Technology and Engineering
ARTICLE-FACTOR
1.3
Article Basics Score: 3
Article Transparency Score: 2
Article Operation Score: 3
Article Articles Score: 3
Article Accessibility Score: 3
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International Category Code (ICC):
ICC-1802
Publisher: Lifescience Global Inc.
International Journal Address (IAA):
IAA.ZONE/1929108035634
eISSN
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1929 - 5634
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Abstract
Surface acoustic wave (SAW) devices consist of a piezoelectric substrate with interdigitated (IDT) electrodes. These devices can be used to fabricate wireless and passive sensors that can be mounted in remote and/or inaccessible places. If encapsulated with CVD diamond, the SAW devices can be made to operate under extremely hostile conditions. The piezoelectric layer (AlN, ZnO etc.) deposited on the diamond or an inverse system can increase the frequency of the SAW device. Most piezoelectric materials (such as quartz) show phase transition temperatures below diamond deposition temperature (650º-1100ºC), preventing their use as a substrate for diamond growth. Langasite La3Ga5SiO14 (LGS) is recently fabricated piezoelectric material that can withstand high temperatures without being deteriorated. LGS does not have phase transitions up to its melting point of 1470°C. Here we report the deposition of diamond films by microwave plasma CVD ...
