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Studying the Effect of AC Source’s Frequencies to Micro Electromechanical System
ISSN: 2348 - 2273
Publisher: author
Studying the Effect of AC Source’s Frequencies to Micro Electromechanical System
Indexed in
Technology and Engineering
ARTICLE-FACTOR
1.3
Article Basics Score: 2
Article Transparency Score: 3
Article Operation Score: 3
Article Articles Score: 2
Article Accessibility Score: 3
SUBMIT PAPER ASK QUESTION
International Category Code (ICC):
ICC-1802
Publisher: International Journal Of Electrical Electronics & Computer..
International Journal Address (IAA):
IAA.ZONE/234856622273
eISSN
:
2348 - 2273
VALID
ISSN Validator
Abstract
This paper presents an actuation method for the Fabry-Pérot (FP) optical filter (Micro Electromechanical System) using the electrostatic force in order to get the desired wavelengths. To control this force, DC source is conventionally used to actuate but the stability is not high. To overcome this problem, in this work we apply an AC actuation at several frequencies and study the effect of the frequencies to control quality. The experimental results with high accuracy and high stability are shown.
